Steven J. Olson,Kent A. Larson,Jennifer M. Berg,Dominique J. Megran
申请号：
US15413022
公开号：
US20180207306A1
申请日:
2017.01.23
申请国别(地区):
US
年份:
2018
代理人:
摘要：
Liquid water detection in a sterilization chamber that can distinguish liquid water from material in the load that is outgassing and can dry the liquid, is independent of the vacuum pump and chamber leak rate, and that is capable of detecting small amounts of liquid and drying the liquid without freezing the liquid in the process is achieved by monitoring conditions in the chamber at two different pressures, one above the boiling point of water and another below the boiling point of water at a given load temperature.
