RADIATION DETECTION ELEMENT SUBSTRATE, INSPECTION DEVICE FOR RADIATION DETECTION ELEMENT SUBSTRATE AND METHOD FOR INSPECTING RADIATION DETECTION ELEMENT SUBSTRATE
PROBLEM TO BE SOLVED: To provide a radiation detection element substrate capable of inspecting a radiation detection element substrate having a plurality of channel terminals in one control pad without drastically adding or changing of the inspection device for the radiation detection element substrate having one transistor in one pixel, an inspection device for the radiation detection element substrate, and a method for inspecting the radiation detection element substrate.SOLUTION: A control pad 28 for inspection having first control terminals 22 for inspection in which control wirings M extend to the outside than a mounting substrate and are connected to each other, and control wirings G extend from first control terminals 14, is provided. The gate off voltage is applied to wiring terminals 24 at one time in which control wirings M are connected to each other, to perform the inspection.【課題】１画素に１つのトランジスタを有する放射線検出素子基板の検査用の検査装置に対して、大きな追加変更を行うことなく、１つの制御パッドに複数チャンネルの端子を有する放射線検出素子基板の検査を行うことが可能な放射線検出素子基板、放射線検出素子基板の検査装置、及び放射線検出素子基板の検査方法を提供することを目的とする。【解決手段】実装基板よりも外側の領域まで制御配線Ｍを延長して、互いに結線すると共に、第１制御端子１４から制御配線Ｇも延長して検査用第１制御端子２２を設けた検査用制御パッド２８を設けている。そして、制御配線Ｍが互いに結線された結線端子２４にゲートオフ電圧を一括して印加して検査を行う。【選択図】図４
