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複数自由度ステージを含むテストアセンブリ
专利权人:
ハイジトロン,インク.HYSITRON,INC.
发明人:
サイランコウスキー,エドワード,アシフ,サイド アマヌラ サイド,メジャー,ライアン,ラスグ,デレク,フォン,ユーシン
申请号:
JP20150150364
公开号:
JP6141918(B2)
申请日:
2015.07.30
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
A multiple degree of freedom sample stage or testing assembly including a multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes a plurality of stages including linear, and one or more of rotation or tilt stages configured to position a sample in a plurality of orientations for access or observation by multiple instruments in a clustered volume that confines movement of the multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes one or more clamping assemblies to statically hold the sample in place throughout observation and with the application of force to the sample, for instance by a mechanical testing instrument. Further, the multiple degree of freedom sample stage includes one or more cross roller bearing assemblies that substantially eliminate mechanical tolerance between elements of one or more stages in directions orthogonal to a moving axis of the respective stages.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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