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Optical image measuring apparatus
专利权人:
发明人:
Hitoshi Shimizu,Takashi Fujimura
申请号:
US14441745
公开号:
US09600886B2
申请日:
2013.10.09
申请国别(地区):
US
年份:
2017
代理人:
摘要:
An optical image measuring apparatus including an optical system, image forming part, controller, and composite-cross-sectional-image forming part. The optical system includes a scanner changing an irradiation position of signal light on an object and a focus position changing part changing a focus position of the signal light. The optical system detects interference light of returned light of the respective signal light from the object and reference light. The image forming part forms a cross-sectional image based on detection results of plural interference light corresponding to plural irradiation positions of the signal light. The controller controls the optical system to irradiate the signal light onto the plural irradiation positions repeatedly while changing focus position. The composite-cross-sectional-image forming part forms one composite cross-sectional image based on two or more of the cross-sectional images based on results of repetitive irradiation of the signal light.
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