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プラズマエッチング装置用の電極に設けられたガス導入孔の測定方法、電極、電極の再生方法、プラズマエッチング装置、ガス導入孔の状態分布図の表示方法
专利权人:
エーサット株式会社
发明人:
鈴木 崇之
申请号:
JP20160550830
公开号:
JP6135965(B2)
申请日:
2015.12.25
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
The present disclosure is to provide a measuring method which can measure a gas introduction hole provided in an electrode for a plasma etching device with high accuracy, and to provide an electrode having a highly accurate gas introduction hole. The measuring method of the gas introduction hole provided in the electrode for the plasma etching device according to the present disclosure is a method for measuring the gas introduction hole provided so as to penetrate the substrate of the electrode for the plasma etching device in the thickness direction, including a step of irradiating light from one surface side of the substrate toward the gas introduction hole; a step of obtaining a two-dimensional image of the light transmitted to the other surface side of the substrate via the gas introduction hole; and a step of measuring at least one of the diameter, the inner wall surface roughness and the degree of perpendicularity of the gas introduction hole based on the two-dimensional image.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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