A device for providing hyperthermia treatment includes an ultrasound energy generator configured to apply low intensity ultrasound to target tissue. The low intensity ultrasound energy induces therapeutic heating in the tissue at or below the surface of the skin. In order to control the temperature of the tissue during therapy, a microwave radiometer, such as a Dicke radiometer, can be used to measure the temperature of the tissue and feed back the temperature measurement to the ultrasound energy generator to control ultrasonic energy produced and control the temperature of the target tissue.