PROBLEM TO BE SOLVED: To provide a method that can immediately decompose a sterilization agent introduced into a depressurized sterilization chamber.SOLUTION: A sterilization unit for sterilizing an object to be sterilized includes a sterilization chamber that is a chamber for sterilizing the object to be sterilized, a decomposition part that decomposes a sterilization agent charged into the sterilization chamber into substances having a smaller sterilization action to the object to be sterilized than the sterilization agent, a vacuum device for vacuuming the sterilization chamber and the decomposition part, and a first valve for opening/closing a passage between the decomposition part and the sterilization chamber, in which the vacuum device depressurizes an atmospheric pressure in the decomposition part and an atmospheric pressure in the sterilization chamber to a predetermined atmospheric pressure, after depressurizing the decomposition part and the sterilization chamber, the first valve is closed such that the decomposition part and the sterilization chamber are not connected and the sterilization agent is introduced into the sterilization chamber, after an atmospheric pressure in the sterilization chamber increases by the introduced sterilization agent, the first valve is opened so that the sterilization agent introduced by the difference between the atmospheric pressure in the decomposition part and an increased atmospheric pressure in the sterilization chamber is sucked to the decomposition part, and the decomposition part decomposes an introduced sterilization agent.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2017,JPO&INPIT【課題】減圧された滅菌室に導入された滅菌剤を直ぐに分解できるようにすること。【解決手段】被滅菌物を滅菌する滅菌装置に、被滅菌物を滅菌するチャンバーである滅菌室、滅菌室に投入された滅菌剤を、被滅菌物への滅菌作用が滅菌剤よりも小さい物質に分解する分解部、滅菌室及び分解部を真空引きする真空機器、分解部と滅菌室との導通を開閉する第1弁を設けて、真空機器により、分解部内の気圧及び滅菌室内の気圧を所定の気圧まで減圧させ、分解部及び滅菌室が減圧された後に、分解部と滅菌室とが導通しないように第1弁を閉めてから滅菌剤を滅菌室に導入し、導入した滅菌剤により滅菌室内の気圧が上昇した後に第1弁を開けることで、分解部内の気圧と上昇した滅菌室内の気圧との違いにより導入した滅菌剤が分解部に吸い出され、分解部が導