PROBLEM TO BE SOLVED: To provide an electron beam sterilization facility capable of effectively attenuating leakage of an X-ray.SOLUTION: An electron beam sterilization facility includes a conveyance device for conveying a container along revolving routes LT1, LT2, and L1-L6, an inner surface electron beam irradiation device, an outer surface electron beam irradiation device, sterilization zones Z2 and Z3 for accommodating the revolving routes L1-L3, and the inner surface and outer surface electron beam irradiation devices, and a trap zone Z1 (Z4) for accommodating the revolving routes LT1 and LT2 (L4-L6) connected to the revolving routes of the sterilization zones from the upstream side (downstream side), and attenuating an electron beam leaked from the sterilization zones. The sterilization zones and the trap zones are partitioned by a shielding wall except for a connection opening for connecting their revolving routes. The outer diameter of one revolving route LT2 (L5) of the revolving routes of the trap zones is larger than the outer diameter of the revolving route L1 (L4) connected to the revolving route from a sterilization zone side.SELECTED DRAWING: Figure 15