PROBLEM TO BE SOLVED: To provide electron beam sterilization facility and an electron beam sterilization method capable of efficiently attenuating the leakage of an X ray.SOLUTION: The facility comprises: a transport device (11, M1-M6) that transports a container (B) along a transportation path (LU, L1-L6) an inner surface electron beam irradiation device (E3) that irradiates an inner surface of the container (B) with an electron beam for sterilization at least one external surface electron beam irradiation device (E1, E2) that irradiates an outer surface of the container (B) with the electron beam for sterilization and a shield chamber (12, R1-R6) that contains the transportation path (LU, L1-L6). The shield chamber (12, R1-R6) has a shield wall (e.g., R2a, R4a). At least one attenuation chamber (R0a, R0b, R2b, R4b), which attenuates the electron beam irradiated from the inner and outer surface electron beam irradiation devices (E1-E3) as well as the X ray generated by the reflection of the electron beam, is formed on the shield wall (e.g., R2a, R4a).
