An electrophysiology catheter has a micro capacitive tactile sensor providedinthe distal section. The distal section may include a tip electrode, a ringelectrodeand/or a balloon catheter adapted for tissue contact. The capacitive forcesensor isconfigured to exhibit a change in capacitance with tissue contact wherein theforceapplied with tissue contact is measured and reliably calibrated in assessinganddetermining the applied force. The capacitive force sensor has a first plateaffixed to atissue contact portion of the catheter, a second plate configured for contactwith thetissue, and an elastically compressible dielectric between the first andsecond plates,wherein the force sensor has a first capacitance when the first and secondplates areseparated by a first distance, and the force sensor has a second capacitancewhen thefirst and second plates are separated by a second different from the firstdistance.
