An electrophysiology catheter has a micro capacitive tactile sensor provided in the distal section. The distal section may include a tip electrode, a ring electrode and/or a balloon catheter adapted for tissue contact. The capacitive force sensor is configured to exhibit a change in capacitance with tissue contact wherein the force applied with tissue contact is measured and reliably calibrated in assessing and determining the applied force. The capacitive force sensor has a first plate affixed to a tissue contact portion of the catheter, a second plate configured for contact with the tissue, and an elastically compressible dielectric between the first and second plates, wherein the force sensor has a first capacitance when the first and second plates are separated by a first distance, and the force sensor has a second capacitance when the first and second plates are separated by a second different from the first distance.
