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非晶質炭素膜からなる層への固定化方法及び積層体
专利权人:
太陽誘電ケミカルテクノロジー株式会社
发明人:
澁澤 邦彦,佐藤 剛
申请号:
JP20150190194
公开号:
JP6085652(B2)
申请日:
2015.09.28
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
A method for fixation, onto a layer comprising an amorphous carbon film and provided on a base material, of a layer comprising a material condensation-reacting with hydroxyl groups on a surface of the amorphous carbon film, whereby, in the layer comprising an amorphous carbon film and provided on the base material, the amorphous carbon film can have a holding power which is strong enough to fix the layer comprising a material condensation-reacting with a hydroxyl group on the surface of the amorphous carbon film and can have uniformity of the holding power. Si and O are added into the layer comprising an amorphous carbon film to thereby improve adhesion durability and binding uniformity of the layer comprising a material condensation-reacting with a hydroxyl group. Particularly, by using a fluorine-based silane coupling agent, it is possible to impart high functions such as water repellency/oil repellency, abrasion resistance, chemical resistance, low friction properties and non-tackiness to the amorphous car
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