非磁性体からなる中間層上に形成された薄膜

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专利权人:

太陽誘電ケミカルテクノロジー株式会社

发明人:

澁澤 邦彦

申请号：

JP20120277209

公开号：

JP6110126(B2)

申请日:

2012.12.19

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

PROBLEM TO BE SOLVED: To achieve more homogeneous and effective formation of a thin film to be formed by a plasma process.SOLUTION: A thin film coat member in one embodiment includes a base material, an intermediate layer formed on one surface of the base material and comprising nonmagnetic material, and a thin film formed by a plasma process on a surface of the intermediate layer opposite to the side on which the base material is formed.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/