The invention relates to the sterilization of a load of goods with hydrogenperoxide vapor in aclosed space. The method involves a sequence of creating a sub-atmosphericpressure in asterilization chamber, introduction of vaporized hydrogen peroxide and the useof a gas circulationdevice within the sterilization chamber, whereby the output of the gascirculation device iscontrolled according to the pressure in the sterilization chamber. A uniformand consistentdistribution of hydrogen peroxide throughout the load is achieved.