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結晶解析装置、複合荷電粒子ビーム装置及び結晶解析方法
专利权人:
株式会社日立ハイテクサイエンス
发明人:
満 欣,藤井 利昭
申请号:
JP20120204612
公开号:
JP6085132(B2)
申请日:
2012.09.18
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
A crystal analysis apparatus includes: a measurement data storage configured to store electron back-scattering pattern (EBSP) data measured at electron beam irradiation points on a plurality of cross-sections of a sample formed substantially in parallel at prescribed intervals; a crystal orientation database configured to accumulate therein information of crystal orientations corresponding to EBSPs; and a map constructing unit that constructs a three-dimensional crystal orientation map based on distribution of crystal orientations in normal directions of a plurality of faces of a polyhedral image having the cross-sections arranged at the prescribed intervals by reading out the crystal orientations in the normal directions of the faces from the crystal orientation database on the basis of the EBSP data stored in the measurement data storage.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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