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撮像装置及び撮像方法
专利权人:
キヤノン株式会社
发明人:
歌川 勉
申请号:
JP2010082815
公开号:
JP5506504B2
申请日:
2010.03.31
申请国别(地区):
JP
年份:
2014
代理人:
摘要:
An imaging apparatus includes an irradiation unit configured to irradiate an object to be examined with a plurality of measuring beams, a scanning unit configured to perform scanning with the plurality of measuring beams, a specifying unit configured to specify a size of an overlap region where scanning regions of the plurality of measuring beams on the object to be examined overlap one another, and a change unit configured to change one of a center-to-center distance of the scanning regions and a size of each of the scanning regions according to the size of the overlap region.
来源网站:
中国工程科技知识中心
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http://www.ckcest.cn/home/

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