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IMAGING APPARATUS AND IMAGING METHOD
专利权人:
Tsutomu Utagawa
发明人:
Tsutomu Utagawa
申请号:
US13634649
公开号:
US20130010258A1
申请日:
2011.03.29
申请国别(地区):
US
年份:
2013
代理人:
摘要:
An imaging apparatus includes an irradiation unit configured to irradiate an object to be examined with a plurality of measuring beams, a scanning unit configured to perform scanning with the plurality of measuring beams, a specifying unit configured to specify a size of an overlap region where scanning regions of the plurality of measuring beams on the object to be examined overlap one another, and a change unit configured to change one of a center-to-center distance of the scanning regions and a size of each of the scanning regions according to the size of the overlap region.
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