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MEMS device and process
专利权人:
发明人:
James Thomas Deas,Scott Lyall Cargill
申请号:
US15660508
公开号:
US10111021B2
申请日:
2017.07.26
申请国别(地区):
US
年份:
2018
代理人:
摘要:
The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.
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