您的位置: 首页 > 农业专利 > 详情页

MEMS device and process
专利权人:
Cirrus Logic International Semiconductor Ltd.
发明人:
James Thomas Deas,Scott Lyall Cargill
申请号:
US16136939
公开号:
US10674298B2
申请日:
2018.09.20
申请国别(地区):
US
年份:
2020
代理人:
摘要:
The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped such that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

意 见 箱

匿名:登录

个人用户登录

找回密码

第三方账号登录

忘记密码

个人用户注册

必须为有效邮箱
6~16位数字与字母组合
6~16位数字与字母组合
请输入正确的手机号码

信息补充