Rare earth regenerator particles, rare earth regenerator particles, and cold head, superconducting magnet, inspection device, cryopump using the same

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专利权人:

東芝マテリアル株式会社;株式会社東芝

发明人:

山田 勝彦,布施 圭一

申请号：

JP2014540740

公开号：

JP6339017B2

申请日:

2013.10.08

申请国别(地区):

JP

年份:

2018

代理人:

摘要：

A rare earth regenerator material particle and a regenerator material particle group having a high long-term reliability, and a superconducting magnet, an examination apparatus, a cryopump and the like using the same are provided. A rare earth regenerator material particle contains a rare earth element as a constituent component, and in the particle, a peak indicating a carbon component is detected in a surface region by an X-ray photoelectron spectroscopy analysis.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/