PROBLEM TO BE SOLVED: To stably suppress deterioration of an adsorption means for a long period, in an active species generation device.SOLUTION: This active species generation device includes: a body case 6 a flat plate-shaped insulative substrate 16, provided in the body case 6, having a hole part 21 a discharge electrode 17 disposed opposite to the hole part 21 on one face side of the insulative substrate 16 the adsorption means 18 provided on the inner face of the hole part 21 of the insulative substrate 16 and on the surface of the one face of the insulative substrate 16, and adsorbing neighborhood moisture an electroconductive part 23 provided such that the electroconductive part 23 covers a peripheral part of the adsorption means 18 a counter electrode 19 electrically connected with the electroconductive part 23 and a power supply part 20 applying a voltage to between the counter electrode 19 and the discharge electrode 17. The electroconductive part 23 is formed of a metallic flat plate.COPYRIGHT: (C)2013,JPO&INPIT【課題】本発明は、活性種発生装置において吸着手段の劣化を長期間安定して抑制することを目的とするものである。【解決手段】本体ケース6と、前記本体ケース6内に設けられるとともに、孔部21を有する平板形状の絶縁性基板16と、前記絶縁性基板16の一方面で、前記孔部21に対向して配置された放電電極17と、前記絶縁性基板16の孔部21の内面と前記絶縁性基板16の前記一方面表面とに設けた近傍の水分を吸着する吸着手段18と、この吸着手段18の外周部を覆うごとく設けた導電部23と、この導電部23と電気的に接続された対向電極19と、この対向電極19および前記放電電極17に電圧を印加する電源部20とを備え、前記導電部23は、金属製平板からなることを特徴とする。【選択図】図6
