Stephen W. Farrer,James Copland,Thomas D. Raymond,Wei Xiong
申请号：
US13356131
公开号：
US20120113391A1
申请日:
2012.01.23
申请国别(地区):
US
年份:
2012
代理人:
摘要：
A system for determining a surface shape of a test object includes a pattern having a plurality of first elements dispose about a central axis and defining an aperture containing the central axis. The first elements includes a plurality of common elements having a common form and a reference element having a reference form that is different than the common form. The system further comprises a detector array and an optical system. The optical system is adapted to provide an image of the first elements when light reflects off a surface of a test object, passes through the aperture, and is received by the detector array. The reference form may be configured to facilitate an association between the common elements and the spot images of the common elements.
