被験体表面の精密エッチング方法

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专利权人:

株式会社パルメソ

发明人:

松原 亨,勝俣 力

申请号：

JP20150073653

公开号：

JP6154842(B2)

申请日:

2015.03.31

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

PROBLEM TO BE SOLVED: To provide an epoch-making evaluation method of a specimen, capable of showing an unconventional action effect.SOLUTION: In an evaluation method of a specimen, an injection material formed by mixing polygonal-shaped abrasive grains having an average grain size of about 1.2 μm or less into liquid is jetted out together with compressed air to a specimen by controlling an etching rate at 0.05 μm/g or less per unit projection grain quantity, and then a physical property distribution on a longitudinal section of the specimen is evaluated.SELECTED DRAWING: Figure 1

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