PROBLEM TO BE SOLVED: To provide a steam sterilizer capable of surely supplying an amount of liquid necessary for sterilization treatment into a chamber. SOLUTION: At the time of supplying water to a chamber, at time Tb, a temporary stop process for temporarily stopping the transfer of water to the chamber is executed. After the temporary stop processing, at time Tc, restart processing for restarting the transfer of water to the chamber is executed. [Selection diagram] Figure 4【課題】滅菌処理に必要な量の液を確実にチャンバ内に供給できる蒸気滅菌器を提供する。【解決手段】チャンバへの給水時に、時刻Tbで、チャンバへの水の移送を一時停止する一時停止処理が実行される。一時停止処理の後に、時刻Tcで、チャンバへの水の移送を再開する再開処理が実行される。【選択図】図4