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Optical alignment apparatus and optical alignment method
专利权人:
レイン アプライド ダイアノスティクス リミテッド
发明人:
ハーン, オースティン,メドウクロフト, サイモン,ホリー, リチャード,ハーン, オースティン,メドウクロフト, サイモン,ホリー, リチャード
申请号:
JP2010518747
公开号:
JP5512520B2
申请日:
2008.07.29
申请国别(地区):
JP
年份:
2014
代理人:
摘要:
An optical measurement apparatus comprises an optical system (100). The optical system (100) comprises a source (102) and an image capture device (112). The source (102) is arranged to generate, when in use, a beam of electromagnetic radiation. Further, the optical system (100) is arranged to direct the beam of electromagnetic radiation to a location to be measured (132). The optical measurement apparatus also comprises a feedback arrangement (400, 602, 604) arranged to receive a reflected beam from the location to be measured and to provide feedback information in response to receipt of the reflected beam, the feedback information being indicative of degree of alignment of the location to be measured with the optical system.
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