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Diffraction grating and alignment method thereof, and radiation imaging system
专利权人:
Yasuhisa Kaneko;Hiroyasu Ishii
发明人:
Yasuhisa Kaneko,Hiroyasu Ishii
申请号:
US13016978
公开号:
US08755487B2
申请日:
2011.01.29
申请国别(地区):
US
年份:
2014
代理人:
摘要:
An X-ray imaging system includes first to third absorption gratings. Initially, the third absorption grating is disposed in a Z axis orthogonal to a detection surface of a FPD, and the position of the third absorption grating is adjusted in θx and θy directions based on a dose of X-rays having passed through the third absorption grating. Then, the first absorption grating is disposed in the Z axis so as to produce a moiré pattern. The position of the first absorption grating is adjusted in the θx and θy directions so that a frequency of the moiré pattern detected by the FPD becomes uniform. Then, the position of the first absorption grating is adjusted in a Z or θz direction so that the FPD loses the detection of the moiré pattern. After that, the second absorption grating is aligned in a like manner as the first absorption grating.
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