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CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (cMUT) DEVICE AND METHOD OF CONTROLLING THE SAME
专利权人:
发明人:
申请号:
EP06811092.3
公开号:
EP1932479B1
申请日:
2006.10.03
申请国别(地区):
EP
年份:
2015
代理人:
摘要:
A capacitive micromachined ultrasonic transducer (cMUT) device, comprising: a cMUT formed on a semiconductor substrate a DC high-voltage generation unit that is provided on the semiconductor substrate and that is for generating a DC high-voltage signal to be superposed on a driving signal for the cMUT a driving signal generation unit that is provided on the semiconductor substrate and that is for generating the driving signal and a superposition unit that is provided on the semiconductor substrate and that is for branching the DC high-voltage signal output from the DC high-voltage generation unit and for superposing one of the branched DC high-voltage signals on the other of the branched DC high-voltage signals via the driving signal generation unit.
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