PROBLEM TO BE SOLVED: To provide a method of evaluating a carburized component, configured to analyze carbon concentration after gas carburization with a comparatively simple apparatus.SOLUTION: In evaluating a component with a carburized surface, the surface of the component is subjected to fluorescent X-ray analysis, to measure carbon concentration of the surface. The surface is ground, and the ground surface is subjected to fluorescent X-ray analysis again to measure carbon concentration of the surface. The above operation is repeated, to measure a carbon concentration distribution up to a carburization depth, for evaluating the component.