PROBLEM TO BE SOLVED: To speed up aberration correction by calculating a correction amount by a proper method according to the state of the aberration correction.SOLUTION: An aberration correction method includes: a selection process of selecting a first polarized component of reflected light obtained by irradiating an object to be inspected with measurement light a first aberration measurement process of measuring the aberration of the first polarized component a first aberration correction process of correcting the aberration of the first polarized component by controlling a first aberration correction means according to a measured value of the aberration of the first polarized component and a second aberration correction process of correcting, in a case where the value of the aberration corrected in the first aberration correction process has become smaller than a prescribed value, the aberration of a second polarized component of the reflected light different from the first polarized component by controlling a second aberration correction means based on control to the first aberration correction means in that case.COPYRIGHT: (C)2013,JPO&INPIT【課題】 収差補正を高速化する。【解決手段】 被検査物に測定光を照射することにより得られる反射光の第一の偏光成分を選択する選択工程と、第一の偏光成分の収差を測定する第一の収差測定工程と、第一の偏光成分の収差の測定値に応じて第一の収差補正手段を制御することで第一の偏光成分の収差を補正する第一の収差補正工程と、第一の収差補正工程において補正された収差の値が所定の値未満となった場合に、当該場合における第一の収差補正手段に対する制御に基づいて第二の収差補正手段を制御することで第一の偏光成分とは異なる反射光の第二の偏光成分の収差を補正する第二の収差補正工程とを有する。【選択図】 図1
