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X-ray imaging apparatus
专利权人:
CANON KABUSHIKI KAISHA
发明人:
Soichiro Handa
申请号:
US13763325
公开号:
US09068919B2
申请日:
2013.02.08
申请国别(地区):
US
年份:
2015
代理人:
摘要:
An X-ray imaging apparatus for imaging an object to be inspected includes a grating that forms a periodic pattern using an X-ray from an X-ray source and a detector that detects the periodic pattern. In the X-ray imaging apparatus, when θ1 is an angle formed between a first direction, which is a periodic direction of the periodic pattern in a plane that is perpendicular to an optical axis of the X-ray, and a line parallel to an X-ray receiving surface of the detector in the plane, and θ2 is a grazing angle of the X-ray relative to the X-ray receiving surface,1sin2θ1sin2θ2+cos2θ1>;2 holds. Also in the X-ray imaging apparatus, an angle formed between a surface of the grating and the optical axis of the X-ray is from 45 to 90°.
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