超音波デバイス、超音波デバイスの製造方法、プローブ、電子機器、超音波画像装置

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专利权人:

セイコーエプソン株式会社

发明人:

清瀬 摂内

申请号：

JP2014016639

公开号：

JP6326833B2

申请日:

2014.01.31

申请国别(地区):

JP

年份:

2018

代理人:

摘要：

An ultrasonic device (17) includes a substrate (21), an acoustic matching layer, an acoustic lens (52, 81, 87), and a structure (53, 79). The substrate (21) has an element array (22) including a plurality of thin-film ultrasonic transducer elements (23) arranged in an array form. The acoustic matching layer covers the element array (22). The acoustic lens (52, 81, 87) is arranged on the acoustic matching layer. The structure (53, 79) is arranged between the acoustic lens (52, 81, 87) and the substrate (21) and has a larger compressive strength than a compressive strength of the acoustic matching layer.

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中国工程科技知识中心

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