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IMAGING APPARATUS, CONTROL METHOD, AND STORAGE MEDIUM
专利权人:
发明人:
Futoshi Hirose
申请号:
US14606846
公开号:
US20150138506A1
申请日:
2015.01.27
申请国别(地区):
US
年份:
2015
代理人:
摘要:
An imaging apparatus includes a measuring light focusing unit configured to focus measuring light for measuring aberration of an object on the object, an aberration correction unit configured to change a state based on the aberration measured with the measuring light, an imaging light focusing unit configured to focus imaging light for capturing an image of the object on the object, an imaging unit configured to capture an image of the object with the imaging light having passed through the aberration correction unit and the imaging light focusing unit, and a control unit configured to interlockingly control states of the measuring light focusing unit and the imaging light focusing unit.
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中国工程科技知识中心
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