PROBLEM TO BE SOLVED: To provide a silica dispersion that maintains antifungal properties for the long term and can prevent the deterioration of polishing performance.SOLUTION: In one or plural embodiments, a silica dispersion comprises a silica particle, water and a preservative, where the preservative is selected from the group consisting of the formula (A), the formula (B), and a combination of them, where in the formula (A), M is an alkali metal, and in the formula (B), R is a hydrogen atom, halogen, or a hydrocarbon group].SELECTED DRAWING: NoneCOPYRIGHT: (C)2016,JPO&INPIT