PROBLEM TO BE SOLVED: To increase a surface to be irradiated with electron beams in an object to be irradiated by devising a moving direction of the object to be irradiated with respect to electron beams in an electron beam irradiation region.SOLUTION: An electron beam irradiation apparatus 200 comprises an electron beam irradiation section (electronic gun 210, prebuncher 216, accelerator 218 and scan horn 220) which irradiates an object W to be irradiated with electron beams, and a rotation device 250 which rotates the object W to be irradiated in an irradiation region R where the object W to be irradiated is irradiated with electron beams by the electron beam irradiation section, while allowing a rotational axis to cross an irradiation direction of electron beams at an angle smaller than 90°.COPYRIGHT: (C)2013,JPO&INPIT【課題】電子線の照射領域において、電子線に対する被照射物の移動方向を工夫することで、被照射物における電子線の照射面を増加させる。【解決手段】電子線照射装置200は、被照射物Wに電子線を照射する電子線照射部(電子銃210、プリバンチャ216、加速器218、スキャンホーン220)と、電子線照射部によって被照射物Wに電子線が照射される領域である照射領域Rにおいて、電子線の照射方向に対して90度未満の角度で回転軸を交差させて被照射物Wを回転させる回転装置250とを備える。【選択図】図6
