光干渉式距離計測装置
- 专利权人:
- 株式会社ニデック
- 发明人:
- 遠藤 雅和
- 申请号：
- JP2009030489
- 公开号：
- JP5249073B2
- 申请日:
- 2009.02.12
- 申请国别(地区):
- JP
- 年份:
- 2013
- 代理人:
- 摘要：
PROBLEM TO BE SOLVED: To stably acquire a good result of measurement regardless of the irregularity in beat frequency.
SOLUTION: The optical interference distance measuring apparatus includes an interference optical system for receiving the reflection light from a sample as interfering light in a light receiving element, and an arithmetic operating section for acquiring distance information by processing the light receiving signal output from the light receiving element. The arithmetic operating section includes a beat frequency detecting means for detecting the frequency of a beat component included in the light receiving signal output from the light receiving element, and a bandpass filter which permits passage of frequencies in a necessary range included in the light receiving signal output from the light receiving element pass, and which can change the frequency band to pass based on the beat frequency detected by the beat frequency detecting means. The distance information is acquired based on the interfering signal extracted by the bandpass filter.
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- 来源网站：
- 中国工程科技知识中心
