< Topic >The case where the hydrogen peroxide gas is formed it decreases the residual solution to the utmost.Solutions Before the hydrogen peroxide gas formation device of this invention giving the ultrasonic vibration to the hydrogen peroxide water which is stored in the storage section being atomized with the atomization section and the aforementioned atomization section which are made to atomize, in order with the carrier gas for the hydrogen peroxide water which flows to be discharged, the flame tube section and the aforementioned flame tube section which lead the particular hydrogen peroxide water to the upper part being arranged in the inside space, forms the double tube, faces to the aforementioned storage section and is communicated in the barrel section, and the aforementioned barrel section which form the gas passage for the aforementioned carrier gas which falls, with the aforementioned flame tube sections being introduced into the aforementioned barrel section the carrier gasThe gas introduction section and the aforementioned gas introduction section of the air which flows it features that it has the heater which heats the carrier gas which flows and.< Selective figure >Figure 2【課題】過酸化水素ガスを生成する際の残留溶液を極力少なくする。【解決手段】本発明の過酸化水素ガス生成装置は、貯留部に貯留された過酸化水素水に超音波振動を与えて霧化させる霧化部と、前記霧化部で霧化されてキャリアガスとともに流れる過酸化水素水が排出されるように当該過酸化水素水を上方へ導く内筒部と、前記内筒部が内側空間に配置されて二重管を構成し、前記貯留部へ向かって下降する前記キャリアガス用のガス流路を、前記内筒部との間に形成する外筒部と、前記外筒部に連通され、前記外筒部に導入される前のキャリアガスが流れる中空のガス導入部と、前記ガス導入部を流れるキャリアガスを加熱するヒーターと、を備えたことを特徴とする。【選択図】図2
