PIEZOELECTRIC VALVE MODULE, METHOD FOR MANUFACTURING THE VALVE MODULE, METHOD FOR OPERATING THE VALVE MODULE, AND RESPIRATORY AID DEVICE INCLUDING ONE OR MORE OF THE VALVE MODULES
Domenico GIUSTI,Oriana Rita Antonia DI MARCO,Igor VARISCO
申请号：
US16295410
公开号：
US20190285196A1
申请日:
2019.03.07
申请国别(地区):
US
年份:
2019
代理人:
摘要：
A valve module includes a semiconductor body, cavities in the semiconductor body separated from each other by a distance, a cantilever structure suspended over each cavity to enable at least partial closing of the cavity, and a piezoelectric actuator for each cantilever structure. The piezoelectric actuator is configured for use to cause a positive bending of the respective cantilever structure and so modulate a rate of air flow through the valve module.
