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MANUFACTURING PROCESS OF A PIXEL ARRAY OF A THERMAL PATTERN SENSOR AND ASSOCIATED SENSOR
专利权人:
IDEMIA IDENTITY &; SECURITY FRANCE;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
发明人:
Jean-Francois MAINGUET,Joel-Yann FOURRE,Christophe SERBUTOVIEZ,Mohammed BENWADIH
申请号:
US16542236
公开号:
US20200057879A1
申请日:
2019.08.15
申请国别(地区):
US
年份:
2020
代理人:
摘要:
The invention relates to a manufacturing process of a pixel array of a thermal pattern sensor comprising the steps of:providing a substrate;depositing a first layer of electrically conductive material, including depositing electrically conductive tracks, depositing of connector pins and depositing a ground strip;depositing of second layer of pyroelectric material covering the tracks and leaving at least part of the connector pins free;depositing of third layer of electrically conductive material;depositing of fourth layer of dielectric material in contact with the third layer;depositing of a fifth layer including electrically conductive heating tracks;depositing of a sixth protective layer,wherein the step of depositing the second and/or third and/or fourth and/or sixth layer is carried out by slot-die coating.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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