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Probe, object information acquisition apparatus, and method of manufacturing the probe
专利权人:
CANON KABUSHIKI KAISHA
发明人:
Takahiro Akiyama,Yoshio Hotta
申请号:
US14052351
公开号:
US09618386B2
申请日:
2013.10.11
申请国别(地区):
US
年份:
2017
代理人:
摘要:
A probe configured to receive an acoustic wave from an object including an element having a cell structure, in which a vibration membrane having one of a pair of electrodes formed with a gap arranged therebetween is supported so that the vibration membrane can be vibrated by the acoustic wave; a light reflection layer provided at a position near the object with respect to the element and configured to reflect light; and a support layer provided between the element and the light reflection layer and configured to support the light reflection layer.
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中国工程科技知识中心
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