PROBLEM TO BE SOLVED: To reduce a phase difference (phase delay) between different polarization components produced by being reflected from or transmitted through optical members provided in an optical path.SOLUTION: An imaging apparatus for taking an image of a test object includes a splitting means for splitting light, in which a return beam from a test object irradiated with a measuring beam and a reference beam corresponding to the measuring beam are multiplexed, into a plurality of light beams different in polarization components, and a detection means for detecting the plurality of light beams. The imaging apparatus also includes a correction means for correcting a phase difference between the different polarization components produced by optical members provided in an optical path.COPYRIGHT: (C)2016,JPO&INPIT【課題】 光路に設けられた光学部材の反射や透過により生じる異なる偏光成分の間の位相差(位相遅延)を低減すること。【解決手段】 撮影装置は、測定光を照射した被検査物からの戻り光と前記測定光に対応する参照光とを合波した光を偏光成分が異なる複数の光に分割する分割手段と、前記複数の光を検出する検出手段と、を有する被検査物を撮影する撮影装置であって、光路に設けられた光学部材により生じる異なる偏光成分の間の位相差を補正する補正手段を有する。【選択図】 図4
