Ecole Polytechnique;Centre National de la Recherche Scientifique;Institut Francais des Sciences et Technologies des Transports de l'Amenagement et des Reseaux
发明人:
Cojocaru Costel-Sorin,Bouanis Fatima Zahra,Rose Kitchner Max Garry
申请号：
US201515516921
公开号：
US10158093(B2)
申请日:
2015.10.07
申请国别(地区):
美国
年份:
2018
代理人:
Morgan, Lewis & Bockius LLP
摘要：
The invention relates to a method for manufacturing an electronic device, particularly a device including a flexible and/or low-cost substrate and/or carbon nanotubes, and also relates to electronic devices produced using said method. The method for manufacturing an electronic device, including a substrate mad of a material M and an active semiconductor material layer (3), includes the following steps: a) providing a carrier (10) made of an alkali metal salt or alkaline earth metal salt, preferably sodium chloride (NaCl) or potassium chloride (KCl); optionally, b) depositing a dielectric material layer (2) onto one surface of the carrier; c) forming an active semiconductor material layer (3) on one surface of the carrier when Step b) is not implemented or on the free surface of the layer when Step b) is implemented; d) forming different components of the electronic device on and/or under the layer; e) depositing a protective layer onto the layer stack, obtained in Step d), of the different components of the e
