Dylan Van Hoven,Jeffrey Brown,Paul Douglas Corl,Michael Reiter
申请号：
US14105360
公开号：
US20140178574A1
申请日:
2013.12.13
申请国别(地区):
US
年份:
2014
代理人:
摘要：
The present disclosure provides methods and apparatus of fabricating a transducer for use in ultrasound imaging. A substrate is provided. The substrate may be a silicon substrate having a first side and a second side opposite the first side. A transducer membrane is formed over the first side of the substrate. The transducer membrane includes a piezoelectric component. A well is formed in the substrate from the second side. A backing material is dispensed onto a first sidewall of the well in a manner so as to create a capillary effect that causes the backing material to wick down the sidewall, across the back side of the substrate exposed by the well, and up a second sidewall of the well. The transducer membrane is deflected so that the transducer membrane has a concave shape.
