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表面張力を利用したスピン洗浄装置
专利权人:
国立研究開発法人産業技術総合研究所;株式会社プレテック
发明人:
原 史朗,クンプアン ソマワン,池田 伸一,後藤 昭広,天野 裕
申请号:
JP20130249358
公开号:
JP6288698(B2)
申请日:
2013.12.02
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a wafer cleaning machine capable of efficiently cleaning a wafer with a small amount of a cleaning liquid and utilizing surface tension, and a method for cleaning a wafer using the wafer cleaning machine.SOLUTION: A spin cleaning machine of the present invention includes: a stage 34 on which a wafer W is placed; a rotation drive section 34b for rotating the stage 34 in a circumferential direction; a liquid discharge nozzle 35 provided to face the wafer W placed on the stage 34 and supplying a cleaning liquid L on the wafer W placed on the stage 34; and a control unit 4 for allowing the cleaning liquid L of a predetermined amount for filling a space S to be supplied into the space S through the liquid discharge nozzle 35, the space S being formed between the wafer W placed on the stage 34 and the liquid discharge nozzle 35.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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