Koo, Il-Gyo,Scott, Douglas A.,Moore, Cameron A.,Collins, George J.,Douglas, K. Antioco
申请号:
AU2009347180
公开号:
AU2009347180A1
申请日:
2009.09.30
申请国别(地区):
AU
年份:
2012
代理人:
摘要:
The present disclosure provides for a plasma device, which includes inner and outer electrodes. The inner electrode has a substantially cylindrical tubular shape and an opening defined therethrough. The inner electrode has a proximal portion. The outer electrode has a substantially cylindrical tubular shape. The outer electrode is coaxially disposed about the proximal portion of the inner electrode. The dielectric spacer includes a substantially toroidal shape disposed between the inner and the outer electrode. The inner and outer electrodes are configured to couple to an ionizable media source configured to supply ionizable media thereto. The inner and outer electrodes are configured to couple to a power source configured to ignite the ionizable media at the plasma device to form a plasma effluent.