PROBLEM TO BE SOLVED: To provide a sterilizer, enabling to efficiently sterilize an object even by use of a low-energy electron beam.SOLUTION: The sterilizer 1, which uses an electron beam irradiation device 11 to sterilize an object housed in a chamber 2, includes a secondary electron generating member 12 provided in the chamber 2 to cause emission of electrons from atoms as secondary electrons by collision of an electron beam, and a hydrogen peroxide introducing device 16 to introduce hydrogen peroxide to the range in the chamber 2 from the secondary electron generating member 12 to the object, so that the electron beam is irradiated to the object side surface of the secondary electron generating member 12 by the electron beam irradiation device 11.COPYRIGHT: (C)2012,JPO&INPIT【課題】低エネルギーの電子線によっても、被滅菌物を効率的に滅菌することができる滅菌装置を提供する。【解決手段】電子線照射装置11を用い、チャンバー2内に収容された被滅菌物を滅菌する滅菌装置1において、チャンバー2内に設けられ、電子線の衝突により原子中の電子が二次電子として飛び出す二次電子発生部材12と、二次電子発生部材12から被滅菌物に至るチャンバー2内の領域に、過酸化水素を導入する過酸化水素導入装置16とを備え、電子線照射装置11より二次電子発生部材12の被滅菌物側の面に電子線を照射する。【選択図】図2
