VERFAHREN UND VORRICHTUNG ZUR ÜBERWACHUNG DER INTENSITÄT EINES ELEKTRONENSTRAHLS

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专利权人:

KHS GMBH

发明人:

KEIL, GERNOT,MONZEL, ALOIS

申请号：

EP10716482.4

公开号：

EP2422351A1

申请日:

2010.04.20

申请国别(地区):

EP

年份:

2012

代理人:

摘要：

The method and the device are used to monitor the intensity of an electron beam. In order to detect changes in intensity of the electron beam, electromagnetic radiation directly or indirectly emitted by the electron beam is detected and evaluated. This particularly refers to the evaluation of ultraviolet radiation and/or radiation in the range of visible light.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/