PROBLEM TO BE SOLVED: To provide a vacuum cooling device which can optimally control the temperature of cooling water to be supplied to a heat exchanger 11.SOLUTION: The vacuum cooling device includes: a processing tank 2 which stores an object to be cooled a vacuum producing device 1 which is connected with the processing tank and sucks air in the processing tank the heat exchanger 11 which cools the air sent from the processing tank to the vacuum producing device a cool water unit 15 which cools the cooling water to be supplied to the heat exchanger and a water tank 3/4 which stores the cooling water after performing heat exchange by means of the heat exchanger and performs water feed to the cool water unit wherein the cooling of the object to be cooled is performed by evacuating air in the processing tank. In the vacuum cooling device, the water tank is disposed to be divided into a high-temperature side water tank 3 for supplying the cooling water of a relatively high temperature to the cool water unit and a low-temperature side water tank 4 for supplying the cooling water of a relatively low temperature to the cool water unit and the temperature of the cooling water to be sent to the heat exchanger is adjusted by adjusting the supply proportion of the cooling waters having different temperatures.COPYRIGHT: (C)2012,JPO&INPIT【課題】熱交換器11へ供給する冷却用水の温度を最適にコントロールする。【解決手段】被冷却物を収容する処理槽2、処理槽と接続しており処理槽内の空気を吸引する真空発生装置1、処理槽から真空発生装置へ送られている空気を冷却する熱交換器11、熱交換器へ供給する冷却用水を冷却する冷水ユニット15、熱交換器で熱交換を行った冷却用水を溜めておき冷水ユニットへの給水を行う水槽3/4を持ち、処理槽内を真空化することで被冷却物の冷却を行う真空冷却装置において、前記水槽は比較的高温の冷却用水を冷水ユニットへ供給するための高温側水槽3と、比較的低温の冷却用水を冷水ユニットへ供給するための低温側水槽4を分割して設けておき、温度が異なっている冷却用水の供給割合を調節することによって熱交換器へ送る冷却用水の温度を調節する。【選択図】図1
