Makoto Fukuhara,Nobuhiro Tomatsu,Toshiharu Sumiya,Makoto Sato
申请号：
US14742372
公开号：
US09841268B2
申请日:
2015.06.17
申请国别(地区):
US
年份:
2017
代理人:
摘要：
An imaging apparatus configured to image an object to be examined is provided. The apparatus includes a splitting unit configured to split light obtained by combining the returned light and the reference light into a plurality of lights having different polarization components and a detecting unit configured to detect the plurality of lights. The apparatus further includes a correcting unit configured to correct a phase difference between different polarization components generated by an optical member provided on an optical path of the measurement light or an optical path of the reference light.
