FIFE Keith G.,OWENS Jordan,LI Shifeng,BUSTILLO James
申请号：
US201715614589
公开号：
US2018128773(A1)
申请日:
2017.06.05
申请国别(地区):
美国
年份:
2018
代理人:
摘要：
A chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor, the material comprising a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extending a distance along a sidewall of the opening.
