ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人:
Moon Youn Jung,Jinsun Kim
申请号：
US15795754
公开号：
US10056221B2
申请日:
2017.10.27
申请国别(地区):
US
年份:
2018
代理人:
摘要：
Disclosed is an apparatus for generating charged particles. The apparatus comprises a light source that emits a laser, a target layer that receives the laser to generate charged particles, and a focusing structure that is between the light source and the target source and focuses the laser. The focusing structure comprises solid layers and pore sections alternately and repeatedly disposed along a first direction parallel to a top surface of the target layer. Each of the pore sections comprises a porous layer.
